Our group has filed many applications including the following patents.

[Title of the Invention] Film forming apparatus.

[Application number]　PCT / JP2019 / 036700

　

[Title of the Invention] Film forming apparatus.

[Application number]　108137176

　

The present invention relates to a powder film forming method, a powder film forming container, and an ALD apparatus.

[Application number]　PCT/JP2019/047394

　

[Title of the Invention] Paste coating device.

[Application number]　PCT / JP2020 / 000472

　

[Title of the Invention] Paste coating device.

[Application number]　 109100826